TiC/i-C复合硬质膜的过渡层界面和特性的研究

Study on the transition interface of TiC/i-C composite hard films and their properties

  • 摘要: 探讨在i-C(离子辅助沉积)硬质无定形碳膜和钢基基片之间加入碳化钛(TiC)过渡层,以增加膜/基附着力和结合强度的各种优越性。SEM(扫描电镜)和EPMA(电子探针微分析)测试显示TiC中间过渡层与i-C层及基片的界面处的附着结合强度得以改善。划痕测试仪对该复合膜测试则从另一方面提供了膜/基结合强度提高的证据。对该复合膜的宏观机械力学性能的测试表明,它在提高了膜/基结合强度的同时,保持了类金刚石薄膜超高硬度和低摩擦系数的优良特性。

     

    Abstract: Diamond like carbon (DLC) films broadly serve as the anti-wear protection coatings of cutting tools, moulds and so on. However the problem of the adhesion strength of the DLC films and their substrates at the interfaces block their applications in practice. The adhesion can be improved by adding a titanium carbide transition layer (TiC) between the i-C amorphous coating (ion-assisted carbon film)and the steel-based substrate. The test of the SEM (scanning electron microscope) and the EPMA (electron beam probe microanalysis) show improvements of the adhesion strength at the interface of the mid-layer (TiC) and the i-C as well as at the interface of the mid-layer and the substrate. The measurement of the scratch tester provides another evidence of this improvement of the adhesion strength. The macrocosmic tests of the film's mechanical properties show that these composite films retain good performances of the DLC films, such as very high hardness and a very low friction coefficient.

     

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