溶胶凝胶法混合掺杂SnO<sub>2</sub>薄膜的气敏光学特性研究

溶胶凝胶法混合掺杂SnO₂薄膜的气敏光学特性研究

摘要: 采用溶胶凝胶法在玻璃基片上制备混合掺杂Cu_TiO₂和Fe_TiO₂的SnO₂薄膜,常温下对不同掺杂浓度的薄膜在丙酮、乙醇两种气氛作用下进行气敏光学特性测试。研究分析表明,1% Fe_TiO₂_Sn_O₂混合掺杂薄膜的乙醇特性灵敏度在较宽波段保持15%左右;5% Cu_TiO₂_SnO₂混合掺杂薄膜的丙酮气敏特性最好,灵敏度最高可达23.9%。

Abstract: Use the Sol-Gel method on the glass substrate to prepare Cu_TiO₂_SnO₂ and Fe_TiO₂_SnO₂ thin films on different doping concentration.The gas sensing optical properties of the film in the acetone and ethanol are researched at the room temperature.The study analysis showed that the sensitivity of the ethanol characteristics of the 1% Fe_TiO₂_SnO₂ co-doped films maintained about 15% in a wide band;The acetone gas sensing characteristics of the 5% Cu_TiO₂_SnO₂ co-doped thin films had the best sensitivity up to 23.9%.