Abstract: Silicon based light emitting materials are the elemental materials for the future optoelectronic integration. Ion implantation plays a very important role in the research and exploration of silicon based light emitting materials. The discovery of porous silicon is a great progress in silicon based ligh emitting material. Following porous silicon, blue emitting porous SiC, blue emitting Si⁺ implanted SiO₂ and violet emitting Ge⁺ implanted SiO₂ are subsequently fabricated, which improved the research of silicon based light emitting materials into a new thriving stage.