栅结构微陀螺大角速度信号输入下分辨率的研究

Research on the resolution of fence structure micro - gyroscope under large signal input

  • 摘要: 主要研究了大角速度信号输入对栅结构振动式微陀螺及其检测电路分辨率的影响。在0.01-200°/s的动态范围内,按照设计值,陀螺器件与检测电路组成的系统能够分辨0.01°/s的输入角速度变化。考虑到驱动电压和积分电容与敏感电容的特性差异的影响后,当输入角速度大于10°/s时,整个系统即无法分辨0.01°/s的输入角速度变化。针对这种情况,提出了在传感器件上集成关键元件的方法来解决大角速度信号输入下整个系统分辨率降低的问题。

     

    Abstract: This paper primarily addresses the influence of large signal input on the resolution of the fence structure vibratory gyroscope and its interface circuit. The minimum angular rate change which can be sensed by gyroscope and its interface circuit is designed as 0.01°/s. When the effect of drive voltage and the difference of characters between sensitive capacitors and integrator capacitor are taken into account, the system may not detect a variation of angular rate as 0.01°/s with input angular rate larger than 10°/s. The drawback can be eliminated by integrating key component with the sensor.

     

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