Abstract:
Piezoelectric micromotors are a kind of transducers depending on vibration of stator. The properties of the stator determine the realization of micromotor directly. In this paper, we theoretically calculate the intrinsic frequency of the hybrid-structure stator for the first time. The in-plane stress and flexural stress are considered reasonably. The calculated data are in excellent agreement with the experimental results. In addition, the influence of some parameters on intrinsic frequency is also discussed.