非晶金刚石膜的电子场发射性能研究
STUDY ON THE FIELD EMISSION CHARACTERISTICS OF THE AMORPHOUS DIAMOND FILMS
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摘要: 研究了用真空磁过滤弧沉积(FAD)方法制备的非晶金刚石薄膜(a-DF)的电子场发射性能,其最小阈值电压为2.1V。sp3键含量不同的a-DF发射性能也不同,适当的sp2键含量能降低阈值电压,提高sp3键含量能提高发射稳定性。根据实验结果提出了一种发射机制。Abstract: The field emission characteristics of the amorphous diamond films (a-DF) deposited by FAD (Filtered vacuum Arc Deposition) on silicon substrate at different bias voltage was studied and the electron emission characteristics of three kinds of a-DF with different proportion between sp3 and sp2 bonds were compared. A series of bias experiments and life tests were carried out and the observed results were analyzed. Based on that, a field emission mechanism of the a-DF was suggested.
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