聚对二甲苯/SiO2复合薄膜的制备及光学性能研究

Study on preparation and optical properties of Poly（p-xylylene）/SiO2 composite film

    摘要
  • 摘要: 聚对二甲苯是一种可应用于光学器件和晶体保护的新型高分子材料。采用真空化学气相沉积法制备聚对二甲苯薄膜,并通过提拉镀膜法在其表面镀制一层SiO2增透膜,可提高薄膜的透射率至90%以上。用FT-IR、紫外-近红外分光光度计和XPS对聚对二甲苯/SiO2复合薄膜结构和光学性能进行了表征和测试,并初步研究了薄膜受紫外光辐照而产生光氧化现象的机理。

     

    Abstract: Poly（p-xylylene） is a novel material applied in protection of optical components and crystals.Poly（p-xylylene） film was prepared by vacuum Chemical Vapor Deposition process. It is shown that the transmittance of film can be raised to more than 90%by SiO2 anti-reflective coating on its surface.FTIR,UV-visible spectra and XPS were used to characterize the structure and optical property of films. The mechanism of photooxidation of Poly（p-xylylene） film is also prelimiary analyzed .

     

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