Abstract:
A single pyroelectric sensor with composite sensing film based on porous silicon dioxide was fabricated. The sensing film consists of nanometer-sized particles with lead titanate (PT) embedded in a vinylidene-trifluoroethylene P (VDF-TrFE) copolymer. The substrate was obtained by wet oxidation of porous silicon formed by electrochemical method. The results show that, the figure of merit of PT/P (VDF-TrFE) composite with PT volume fraction of 0.12 is 20% higher for pyroelectricity and 34% higher for detectivity than the pure P (VDF-TrFE) film under the same conditions. The current sensitivity of PT/P (VDF-TrFE) sensor based on porous silicon dioxide substrate is about 2 times higher than that of the sensor with the same structure but based on a bulk silicon substrate.