Abstract:
A novel scheme of dual track surface acoustic wave SO
2 gas sensor based on WO
3(Tungsten trioxide) films is proposed.Utilizing Tungsten powders,H
2O
2,CH
3OH and PVP as raw materials and pyrogenation spray method,micro-porous networks WO
3 film is fabricated in measure acoustic track of dual track surface acoustic wave device.The SO
2 gas sensor using dual track surface acoustic wave device based on WO
3 films would absorb and desorbed SO
2 gas in physical method under normal temperature.Because the dual track receiving structure is incorporated into the sensor,the environment disturbance quantities for measurement signal are eliminated,and the reliability and veracity are further improved.Experiments results confirm that the dual track surface acoustic wave SO
2 gas sensor based on WO
3 films is endowed with better reproducibility,and excellent response performance for different concentration SO
2 gas in the measurement range,and the linearity sensitivity reaches to 6.8 KHz/ppm from 0.5ppm to 20ppm.