一种新型无机微晶驻极体材料SiO2-Ta2O5-B2O3-RO的制备与研究

Preparation and study of a novel microcrystalline electret composite: SiO2-Ta2O5-B2O3-RO

  • 摘要: 通过成分选择与匹配,运用高温熔凝工艺在单晶硅片上制备成功SiO2-Ta2O5-B2O3-RO无机复合材料驻极体,实验显示:该材料为微晶结构,具有~2000级别的介电常数;恒栅压电晕充电后可获得与栅压相近的表面电位; TSD热刺激放电显示电流峰位于T=240℃处,固定不变且正负对称,被陷电荷的能阱深度约为~1.22eV;实验结果表明,Si O2-Ta2O5-B2O3-RO是一种同时具备对等正负电荷贮存能力的新型无机微晶驻极体复合材料。

     

    Abstract: A new kind of inorganic electret composite: SiO2-Ta2 O5-B2 O3-RO has been developed via high temperature sintering and elements selecting and matching on the silicon wafer. The test results showed that the sample was a microcrystalline structure while its dielectric constant was up to ~ 2000. The surface potential which was almost equal to the grid voltage could be achieved after Constant-Voltage-Charging,and Thermal Simulated Discharge TSD showed that the negative and positive current peaks were located at T = 240℃ symmetrically and fixedly while the activation energy of the trap was about ~ 1.22 eV. It can be concluded that the Si O2-Ta2 O5-B2 O3-RO was a novel microcrystalline electret composite with good capability of both negative and positive charge storage.

     

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