基于相位解调的光纤MEMS压力传感器
A MEMS pressure sensor based on a phase demodulation method
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摘要: 提出了一种新的压力传感器,该传感器基于Fabry-Perot腔干涉和相位解调理论测量压力。设计用MEMS技术以及普通的光通讯接插件制作出工艺简单,分辨率高的光纤MEMS压力传感器。阐述了传感器的工作原理,分析了硅膜的厚度对传感器性能的影响以及FP腔的长度对反射光信号的影响。研究了基于相位解调法的傅里叶变换方法,傅里叶解调法受光源强度波动的影响较小,解调精度高。实验结果表明改传感器在0-3MPa测量范围内,线性好,灵敏度可达到3.50 m/MPa(腔长改变/压力)。Abstract: A novel optical fiber pressure sensor based on Fabry-Perot(FP) interferometer and phase demodulation method is described.MEMS techniques and the common communicational components are used to fabricate the sensor. The principle of pressure measurement has been introduced;the relationship between silicon membrane size and sensor performance has been illuminated by simulation.Phase demodulation method based on Fourier transformation is explored,which can reduce errors resulting from intensity variation of light source.Experimental results demonstrate that a high linear response in the range of 0MPa to 3MPa and a reasonable sensitivity of 3.50 m/MPa(change in cavity/loaded pressure) have been obtained in this sensor.
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