Abstract: At present,vapor-liquid-solid method（VLS） is an important technology used for the fabrications of one-dimensional nanostructures.In this paper,The principle of vapor-liquid-solid method is firstly introduced,then new advances of its applications in the synthesis for various semiconductor nanowires such as ZnO,GaN,Si and SiC are reviewed.Finally,some improved methods are presented and the developed tendency in the future is also indicated.