Abstract: Anew type of piezoelectric traveling wave micromotors has been designed and fabricated. The small motor is composed by the stator which is the combination of annular/circular membrane and metal elastic base using as the common electrode at the same time and the rotor which is placed on the metal elastic body. Thus, the motor structure is simple and easy to fabricate. A piezoelectric traveling wave micromotor has been fabricated with the stator diameter 8mm. The total thickness of the stator is 350μm. Under the alternative excitation voltage 10-12V, the revolving speed of the rotor is more than 100rpm.