砷化镓阈值电压自动测试系统的研制

Design of GaAs threshold voltage uniformity measurement system

摘要: 介绍了砷化镓阈值电压的测试原理和测试方法,并完成了Φ3"砷化镓阈值电压自动测试系统的设计与研制。该系统包括自动探针台、测量设备和相应的软件。自动探针台的定位精度为10 μm,分辨率为2.4 μm,速度为251 mm/s。阈值电压测量精度为1 mV。该系统可进行Φ3"砷化镓圆片的MESFET器件参数的自动测量、存储和运算,能给出圆片的阈值电压分布图。该系统还可用于大圆片的电阻率、欧姆接触电阻、背栅电压和光敏特性等的测量。

Abstract: The principle and the method of GaAs threshold voltage measurement was introduced.A Φ3" GaAs threshold voltage automatic me asurement system was designed.This system consists of automatic prober,measurement system and soft ware.The orientation precision of the prober is 10 μm,the resolving power is 2.4 μm,the speed is 251 mm/s.The precisio n of V_th measurement is 1 mV.This system can carry out automatic measurement of MESFETs' parameters on Φ3" GaAs wafer.It can save the data,map the Φ3" GaAs threshold voltage.It can also measure the resistivity,backgate effect and so on.