基于原子力显微技术的PZT微阵列图形铁电性能

Measurement of ferroelectric properties of PZT fine patterns by AFM technique

    摘要
  • 摘要: 应用基于原子力显微镜与铁电分析仪联用的方法,在无顶电极的情况下,直接测试了PZT微阵列格点的电滞回线。结果表明,应用铁电分析仪与原子力显微镜联用的测试技术能够表征铁电电容的电滞回线,并且可以定性地评价薄膜微电容的铁电特性。

     

    Abstract: In this study,The hysteresis loops of the cell in PZT array were in-situ measured in the absence of the top electrode by the online-operation of TF analyzer and atomic force microscope（AFM）.The result shows that the technique can be applied to measure the hysteresis loops and qualitatively analyze the ferroelectric properties of the cell.

     

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