Abstract: Mn_1-xZn_xFe₂O₄ ferrite films were prepared by alternatively sputtering from two targets with the composition of MnFe₂O₄ and ZnFe₂O₄ respectively. The films were deposited on Si （100） substrates and the compositions of the film are modulated by controlling the ratio of the sputtering time from each target. The as-deposited films are amorphous. After being annealed in vacuum furnace at suitable annealing temperature,the polycrystalline Mn-Zn ferrite films were obtained. The films with composition of Mn_0.5Zn_0.5Fe₂O₄ show a maximum saturation magnetization Ms,the effects of fabrication conditions on the film structure and magnetic properties were investigated,such as the sputtering oxygen partial pressure,annealing vacuum pressure and temperature,the thickness of the film and etc. The films show higher coercivity than that of bulk materials,the influence of stress on film’s coercivity was discussed.