Abstract: SiC films were synthesized using hot filament chemical vapor deposition with Fe as catalyst at low substrate temperature. Fe particles were introduced via Fe bulk ablated by pulse-laser deposi-tion in hydrogen ambience of 400Pa. SiC films were characterized by scan electrical morphology（SEM）and Raman spectra. SEM Results show that these SiC nanorods are 10-30nm in diameter and less than 0.5μm in length random aligned in the film. The red shift of the TO phonon mode of the SiC in the Raman spectra indicate the size confinement effect in the growth directi on. All these reveal that the size of the Fe particles affects the growth of nanorods.