Abstract: The amorphous carbon films （α-C） and the nitrogen containing films are prepared by Rf magnetron sputtering. The structure of α-C thin films is investigated by Raman spectra, which shows that the films are of amorphous structure and have diamond-like characteristics. The nitrogen containing films are also studied by using XPS spectra and IR spectra. The reliable experiment data for the practical application of these two kinds of film are provided through optical characterization.