Ba0.6Sr0.4TiO3溅射靶材的烧制和性能分析
Fire process and performance analysis of High-intensity Ba0.6Sr0.4TiO3 target
-
摘要: 介绍了BST压电陶瓷靶的烧制方法,使用添加剂改善了Ba0.6Sr0.4TiO3靶材的结构和性能,解决了BST靶材热稳定性差的问题,同时优化了BST靶材的晶化效果,提高介电性能。实验通过XRD衍射和P-E试验分析了所制BST溅射靶的微结构和铁电特性。Abstract: The progress of fabricating the high-intensities Ba0.6Sr0.4TiO3 target,and meliorated its performance,that solved the ubiquitous difficult problem,low high temperature resistance stability of BST target were presented.A small quantity of additive can promote nucleation and increase the BST films dielectric performance.This paper provides the XRD and P-E testing results,which indicates this BST target has crystalloid structure and good ferroelectric performance.
下载: