用于微机械器件的电镀Fe-Ni合金薄膜的研究

ELECTRODEPOSITED Fe-Ni ALLOY FILMS FOR MEMS APPLICATIONS

  • 摘要: 本文考察了非常规Fe-Ni合金电镀中,溶液浓度、电流密度、pH值和温度等因素对电镀的影响。实验结果表明,Fe-Ni合金电镀的异常性是由于Fe(OH)2对铁离子和镍离子的还原反应有着不同的阻碍作用和阻碍程度。用X射线平移法对Fe-Ni合金镀层的残余应力与电镀参数之间的关系进行了研究。并讨论了薄膜微结构与内应力的关系。

     

    Abstract: The effects of bath composition, current density, pH Value, temperature etc. on the anomality of electrodeposition of Fe-Ni alloy were investigated. The anomality can be interpreted by the different impedement action and degree of Fe(OH)2 on the discharge of iron and nickel ions. The dependence of films stress of Fe-Ni alloy on the electrodeposition parameters was studied by X-ray translation method. The results were discussed in terms of the existing relationship between the films stress and the corresponding microstructures of deposit.

     

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