Abstract: In order to obtain active microfluidic chips,we present a valveless micropump,which is magnetically actuated using an external electromagnet.The micro electromagnetic actuator without enclosed magnetic circuit is fabricated by DE-LIGA technologies on the silicon wafer,the body of micropump contains two nozzle/diffuser elements and a PDMS（polymethylsiloxane） membrane with embedded permanent magnet.Through a series of tests,the micropump possesses the stable work performance and owns higher ratio of performance to volume: the apparent dimension of pump is 32mm×28mm×10mm,with a sinusoidal current of 0.6A,the resonance frequency is 13 Hz,the micropump have been able to provide flow rates up to 180μl/min and back pressure up to 2.75mbar.