基于非线性介电薄膜的电调滤波器优化设计
Optimized design of electrically tunable filter based on nonlinear dielectric film
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摘要: 采用脉冲激光沉积(PLD)法在(001)MgO基片上制备出高质量的SrTiO3(STO)薄膜,构建了Au/STO/MgO结构的叉指电容。在77K、10KHz条件下,对叉指电容的特性进行了测试,结果表明:在40 kV/cm的直流电场作用下,电容值从1.75 pF减小为1.25 pF,电容值的相对变化率为28.5%。在此基础上,根据多层介质叉指电容保角变换模型。定量计算和仿真了STO薄膜的介电常数和微波频率下叉指电容的性能参数,并由此设计了一个三阶带通滤波器,该滤波器可实现13.50%的中心频率移动。Abstract: Excellent（001） SrTiO3（STO） thin films were grown on（001） MgO substrates by pulsed laser deposition（PLD） method.Interdigital capacitors（IDC） were fabricated on the STO films.When the electric field increases from 0 kV/cm to 40 kV/cm,the capacitance drops from 1.75 pF to 1.25 pF at 77K and 10kHz.The permittivity εr of STO films were calculated by the conformal mapping-based models.A three-pole bandpass filter based on the IDC was designed.Excellent performances of the filter are achieved.
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