Abstract: A novel micro electromagnetic vibration energy harvester is presented,which can convert vibration energy into electrical energy according to electromagnetic induction law.It consists of a permanent magnet of SmCo28,a copper planar spring and a two-layer coil.The copper planar spring and two-layer coil are fabricated using UV-LIGA and electroplating technology.The size of the micro vibration energy harvester is about 200mm³ in volume.The result of finite element simulations is that the natural frequency of the resonant structure is 129.3Hz.Initial measurement shows that the peak-to-peak voltage value of the load resistance is 32.5mV when the vibration energy harvester is under a shock with an acceleration of about 3g（g=9.8m/s²）.