基于导电AFM类金刚石膜表面改性研究
Surface modification of DLC film using conductive AFM
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摘要: 用导电原子力显微镜(AFM)针对宏观上绝缘,微观上由导电相sp2和绝缘相sp3混合的类金刚石(DLC)膜,进行表面改性的研究,尤其观察DLC膜表面施加电压前后形貌变化。实验表明,当直流电压加在针尖上,DLC膜形貌未发生变化,而电压施加在样品表面则出现明显纳米加工凹坑。解释了凹坑的“蝴蝶坑”形成原因;对DLC膜力电耦合实验表明,在一定临界压力之下,随针尖对样品作用力的加大,凹坑的深度随之增加。Abstract: Diamond-like carbon(DLC) film composed of macroscopically in sulating but microscopically a mixture of conducting(sp2) and insulating(sp3) phases was locally electrically mod ified by using conductive atomic force microscope(AFM).Especially topography change was observed when DC bias voltage lies applied.The results sh ow that the DLC surface is not modifie dafter direct current is applied on the tip.While positive voltage is applied on DLC surface,nanoscale crater on surface is formed.According to the interaction force between CoCr MESP tip and DLC surface,the "scalewing effect" occurring in the crater is explained.Electromechanical coupling on DLC film indicates that the depth of crater increases with the augment of force applied on surface when norm al pressure is less than a certain threshold value.Therefore,DLC film is asuitable recording med ia for high-density recording devicesusing pit-recording techni que because of its excellent mechani cal properties.
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