纳米结构Pt/WO3薄膜的制备、表征及氢敏性能

Preparation and characterization of Pt/WO3 nano-film and its Hydrogen-sensing Properties

  • 摘要: 以钨粉和双氧水为主要原料,采用溶胶-凝胶法制备了WO3纳米薄膜,并用磁控溅射法在该WO3薄膜表面溅射掺杂了催化剂Pt。研究了该Pt/WO3纳米薄膜的结构和氢敏性能,结果表明,用此种方法制备的WO3基掺Pt薄膜具有良好的氢敏特性;平均膜厚160nm;薄膜经400℃以下退火处理后是非晶态结构,表面疏松多孔,氢敏效果好;经400℃以上退火处理后呈晶态结构,表面粗糙致密,氢敏效果差;Pt掺杂量对薄膜的氢敏效果有影响,掺杂量越多,氢敏效果越差。

     

    Abstract: WO3 nano-film was prepared by the Sol-Gel method using tungste and H2O2 as main materials,and sputtering a litter Pt on the WO3 nano-film by DC reactive magnetron sputtering method in the paper.The constructure and the properties of the Pt/WO3 nano-film were investigated.The results show that the Pt/WO3 nano-films prepared by this method have good hydrogen-sensing properties;Its average thickness is 160nm;The film which annealed below 400℃ is amorphous and has good hydrogen-sensing properties;The film which annealed above 400℃ is crystalline and has less hydrogen-sensing properties;The amount of Pt is main factor influence the film’s hydrogen-sensing properties,the more the better.

     

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