微腔阵列式多功能生物传感器

Micromachined biosensors based on containment array

    摘要
  • 摘要: 报导了谷氨酸、半乳糖集成传感器的制造和表征。传感器建立在硅衬底上用各向异性腐蚀制成的锥形微腔阵列上,不同酶膜沉积在相应的微腔中。采用这种结构可生产多功能的生物传感器。

     

    Abstract: Fabrication and characterization of an integrated glutamate and galactose sensor was reported,which was based on pyramid al containment array produced on silicon by anisotropic etching.The structure of containment array offers the possibility of production of multifunctional biosensors.

     

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