Abstract:
By researching and analyzing the micromechanical gyroscopes, a novel micromechanical gyroscope is proposed and the structure is designed.The method of electrostatic comber drive, capacitive detection of bar structure is used for the structure, and it makes the gyroscope high sensitivity.Slide-film damping is the main air damping of the drive mode and detect mode.It is possible to achieve high Q-values at atmospheric pressure.The gyroscope has the decoupled characteristic.By large number of simulation analysis, frequencies of every mode are gained.Nature frequencies in drive mode and sense mode match.Rationality of the structure is validated.Based on the current technology level, the structure is made, and high sensitivity is validated, too.