Abstract: Eu³⁺ ions doped TiO₂-SiO₂ composite thin films with different annealing temperature were fabricated by sol-gel method.The crystal structure and luminescence properties of the resulting nanofibers were separately investigated by X-ray diffraction（XRD）,Raman,Fourier Transform Infrared Spectra（FTIR） and photoluminescence（PL） spectra.The intensity of visible emission due to Eu³⁺ ions reaches maximum when annealing temperature is at 700℃.The intensity of the infrared emission at 820nm due to the defect states associated with Ti³⁺ ions increases with the annealing temperature increasing.On one hand,the number of Ti³⁺ ions increases with the annealing temperature increasing,which causes the increase of defect levels;on the other hand,the energy back transfers from Eu³⁺ ions to defect level associated with Ti³⁺ ions.These two facts lead to the increase of the emission intensity at 820nm with the annealing temperature increasing.