Hg1-xCdxTe液相外延薄膜的晶体质量分析

STUDY ON THE CRYSTAL PERFECTION OF LPE Hg1-xCdxTe FILMS

  • 摘要: 本文用X-射线双晶摇摆曲线,分析了Hg1-xCdxTe外延薄膜的晶体质量。结果表明,用垂直浸渍液相外延方法生长的Hg1-xCdxTe薄膜,结构均匀性好,晶体质量高;Hg1-xCdxTe外延薄膜表面层的晶体质量,优于其界面层;同时,Hg1-xCdxTe外延薄膜表面层的位错密度,可通过X-射线双晶摇摆曲线的半峰宽估算得到。

     

    Abstract: The crystal perfection of thick Hg1-xCdxTe layers grown by the vertical dipping LPE on CdZnTe substrates has been studied by the X-ray double crystal rocking curve (DCRC) analysis. The structural quality of Hg1-xCdxTe top epilayers is better than that of the region near interface between the substrate and epilayer. The full width at half maximum (FWHM) of DCRCs was measured on a cross array of points over epilayer surface. The dislocation density of Hg1-xCdxTe thick epilayer is calculated using the FWHM values, therefore the map of the structural uniformity of Hg1-xCdxTe epilayers can be obtained in this way. The structural uniformity of the thick Hg1-xCdxTe epilayers is also studied in the growth direction.

     

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