Abstract:
The crystal perfection of thick Hg
1-xCd
xTe layers grown by the vertical dipping LPE on CdZnTe substrates has been studied by the X-ray double crystal rocking curve (DCRC) analysis. The structural quality of Hg
1-xCd
xTe top epilayers is better than that of the region near interface between the substrate and epilayer. The full width at half maximum (FWHM) of DCRCs was measured on a cross array of points over epilayer surface. The dislocation density of Hg
1-xCd
xTe thick epilayer is calculated using the FWHM values, therefore the map of the structural uniformity of Hg
1-xCd
xTe epilayers can be obtained in this way. The structural uniformity of the thick Hg
1-xCd
xTe epilayers is also studied in the growth direction.