金刚石膜紫外光电导探测器及性能

The Ultraviolet light detector and feature for thin diamond film

  • 摘要: 用化学气相沉积法生长金刚石膜,在此膜上制作紫外光电探测器,并作了性能测试。该器件是叉指式电极结构,可以减小电极间隙,减少光激发载流子的损失,提高器件的响应灵敏度。表面处理可除去金刚石膜的低电阻表面层,提高器件对紫外光的探测性能。测试表明,用金刚石制作的器件对波长小于225nm的紫外光的响应比可见光高4个量级。

     

    Abstract: In this paper, the UV photo detector has been constructed from the diamond thin film. We measured the photoelectrical effects of the detector. The lithographic techniques were used to form the interdigitated planar array of 10mm AL contacts with 10mm spacings on the diamond. The design is found to offer great than four orders of magnitude in wavelength discrimination between deep UV and visible light.

     

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