Abstract:
PbZr
0.4Ti
0.6O
3/LaNiO
3(PZT/LNO)multilayer thin films were grown on Pt/Ti/SiO
2/Si substrates by a chemical solution route. The (111) orientation parameter decreases and (100) orienta-tion degree increases by adding LNO layer between PZT and Pt. PZT thin films deposited on LNO/Ptshow smooth surface morphology, denser structure than that deposited on Pt substrate. At an appliedelectric field of 500kV/cm, The remnant polarization (
Pr) and coercive field (
Ec) of the PZT thin films were obtained from the
P-V loop measurements about 37.6μC/cm
2 and 65kV/cm, respec-tively. Dielectric constant is 822 by adding a LNO layer. The properties are improved most profoundlyby a LNO layer with thickness of 40nm.