Abstract: A novel capacitive temperature sensor employing a sandwich structure is presented.The sensing part is a variable capacitor with a conductor（or semiconductor）/dielectric/conductor（or semiconductor） structure.The top and bottom layers are metal and Si respectively,while the center layer is SiO₂.Compared with the traditional temperature sensor,this structure has a wider measuring range.In this paper,mechanical thermal model of the multi-layers was used to analyse the sensor structure,which was also simulated by ANSYS.Larger area and thinner thickness can improve the performance.