芯片实验室的制备技术

Lab-on-a-chip technology

  • 摘要: 阐述了芯片实验室的材料、微细加工、流体驱动等制备技术的近期研究进展。系统介绍了芯片实验室的各种制备技术,这些技术包括紫外光刻、软刻蚀、LIGA技术、DEM技术、键合等。流体驱动是芯片实验室的动力,对多种新颖的流体驱动设计进行了对比,这些设计包括压力驱动、电渗驱动、电水力驱动、表面张力驱动、离心力驱动等。

     

    Abstract: Over the past years, there have been a number of advances in the fields of "lab-on-a-chip". It is focused on materials, microfabrication and mirofluidic manipulations of lab-on-a-chip technology. Some polymer materials are used as substrate. Kinds of new microfabrication technology are presented, including lithography, soft etching, LIGA, DEM and bonding, etc. Microfluidic manipulation is the source power of lab-on-a-chip, some novel designs of microfluidic manipulation are introduced, including pressure, electroosmosis, electorhydrodynamic, surface tension, centrifugal etc.

     

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