Abstract: We report the fabrication and measurement of a microbridge flow sensor. It is produced using silicon micromechanical technology. The bridges which composed of sandwiched materials are suspended over channels etched in silicon. The sensor can measure a gas flow ranging from 0.01 SCCM to 100 SCCM. The response time of sensor has been measured to be less than 10ms. The overall dimensions of the sensor chip are 7mm × 6mm × 0.7mm.