Abstract:
A double-layer composite hard film is introduced. It consists of a TiC film and an i-C (ion assisted deposition) amorphous hard carbon film. The TiC film was prepared by a magnetron controlled reactive sputtering unit and then the i-C film was uninterruptedly prepared by means of plasma decomposition combined with high energy ion bombardment. The TiC film serves as the transition layer because it has a good coalescence and adhesion strength to the substrate and the surface DLC layer, and the i-C film as the surface layer because it has excellent mechanical performances, such as very high hardness and low friction coefficient. Measurements of the mechanical properties and tests of the tribological behavior show that the TiC/i-C composite films have very high hardness and excellent tribological characteristics, such as high anti-adhesion wear, abrasion wear, scratch wear and low friction efficiency and so on.