使用胶体刻蚀法制备纳米线氧化物场效应晶体管

Fabrication of Nanostructured Zn-Sn-O Field Effect Transistor via Colloidal Lithography

  • 摘要: 透明无定形氧化物半导体作为场效应晶体管的沟道材料在微电子学各个领域有着广泛应用。在这里我们报道一种使用胶体刻蚀方法制备Zn-Sn-O (ZTO)纳米线作为场效应晶体管的沟道材料。电学测量显示制备的底栅型ZTO纳米线晶体管有着优良的电学性能, 其中源漏电极间的导通/关闭电流比约为3.9×105, 电子迁移率约为2 cm2/Vs, 而门电极的漏电流却小于1 nA/cm2。在使用分子自组装层封装ZTO表面后, 底栅型ZTO纳米线晶体管的正/负向电压稳定性和回滞性均得到了很大改善, 这得益于氧化物半导体表面污染物的减少。

     

    Abstract: Transparent amorphous oxide semiconductors are promising materials for field effect transistors(FETs) in a wide range of micro-electronic applications. Herein, we report the fabrication of FETs with nanostructured Zn-Sn-O (ZTO) as channel material.The close-packed hexagonal ZTO network was patterned using colloidal lithography.Electrical characterizations of the nanostructured ZTO-FET show a drain-source current on-off ratio of 3.9×105 and effective electron mobilities of 2 cm2/Vs, whereas the gate leakage current is below 1 nA/cm2.Self-assembled monolayers have been used to improve both the positive/negative bias-stress stability and hysteresis of the nanostructured ZTO-FET, which can be attributed to a reduction of contaminants on the oxide back channel surface.

     

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