微型准固态压电风扇研究进展及未来展望

Research progress and future prospect of micro quasi-solid piezoelectric fan

  • 摘要: 微型准固态压电风扇基于压电材料的逆压电效应,利用压电振子的高频振动驱动空气定向流动。该设计无旋转部件,具有结构紧凑、低功耗、低噪声及响应迅速等优势,在受限空间高密度电子器件的热管理领域应用前景广阔。本文综述了国内外主要研究机构及企业在悬臂梁式压电风扇、合成射流式压电气泵和主动散热芯片等方面的最新研究进展与典型产品。重点探讨了提升微型准固态压电风扇性能的关键技术,包括受限空间内的多物理场耦合仿真、流量与背压协同设计、噪声抑制、先进微尺度加工工艺,以及可靠性与工程化挑战。最后,展望了微型准固态压电风扇向小型化、高度集成化以及流量与背压协同提升方向发展的未来趋势。

     

    Abstract: The micro quasi-solid piezoelectric fan, leveraging the inverse piezoelectric effect, utilizes high-frequency vibrations to drive directional airflow, thereby enabling a quasi-solid-state design devoid of rotating components. Such systems offer advantages including compact structure, low power consumption, low noise, and rapid response, demonstrating broad application prospects for the thermal management of high-density electronic devices in confined spaces. This paper reviews the latest research progress and representative products of micro quasi-solid piezoelectric fans, such as cantilever-beam fans, synthetic jet piezoelectric air pumps, and active cooling chips, developed by major research institutions and enterprises globally. Key technologies for optimizing performance are discussed, including multi-physics coupling simulation in confined spaces, collaborative design of flow rate and back pressure, noise suppression, advanced microscale fabrication, and engineering reliability. Finally, future development trends are outlined, focusing on miniaturization, high integration, and the coordinated improvement of flow rate and back pressure.

     

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