氧化铪基铁电场效应晶体管的研究现状与未来

Research status and future prospects of hafnium oxide-based ferroelectric field-effect transistors

  • 摘要: 随着人工智能技术的快速发展,计算机需要处理的数据规模以指数级增长,对计算机的硬件存储性能提出了更高需求。因此,传统存储器如(flash)的读写速度已经无法与CPU的运算速度匹配,从而产生了“存储墙”(memory wall),制约了计算性能的进一步提升。同时,随着高端消费电子产品向移动设备的发展,对硬件的要求也不断提高,尤其对超低功耗计算、高密度和低成本的数据存储等需求日益高涨。自掺杂氧化铪(HfO2)薄膜中铁电性的发现以来,基于氧化铪的铁电材料便引起了器件领域研究人员的广泛关注。得益于氧化铪薄膜与现代半导体制造工艺的良好兼容性及优异的可微缩性,铁电场效应晶体管(FeFET)在先进微电子领域重新崭露头角,成为突破传统存储器性能瓶颈、打破“存储墙”困境的关键候选器件。本文聚焦于FeFET在非易失性存储器中的应用,系统阐述其基本工作原理,深入探讨了掺杂效应、退火工艺及冷却速率等对氧化铪薄膜铁电特性的影响规律。针对FeFET的可靠性问题,重点分析了提升关键器件性能指标(如存储窗口、耐久性与保持时间)的机理与方法。此外,本文还简要综述了FeFET在材料优化(如混合铁电层、新型high-k界面层)与结构创新(如IGZO FeFET)方面的最新研究进展。最后对FeFET的未来发展进行展望,指出氧化铪基 FeFET在嵌入式非易失性存储器、神经形态计算、高密度存储等领域具有重要的商业化应用前景,有望成为下一代微电子存储器件的核心组成部分。

     

    Abstract: With the rapid advancement of artificial intelligence technology, the scale of data to be processed by computers is growing exponentially, imposing increasingly stringent demands on the performance of computer hardware storage. Consequently, the read and write speeds of traditional memory devices such as Flash can no longer match the computing speed of CPUs, thus giving rise to the "Memory Wall", which restricts the further improvement of computing performance. Meanwhile, as high-end consumer electronic products shift toward mobile devices, the requirements for hardware are constantly rising, especially the surging demands for ultra-low power consumption computing, high-density and low-cost data storage. Since the discovery of ferroelectricity in self-doped hafnium oxide (HfO2) thin films, HfO2-based ferroelectric materials have attracted considerable attention from the device engineering community. Owing to the excellent compatibility and scalability of HfO2 thin films with modern semiconductor manufacturing processes, ferroelectric field-effect transistors (FeFETs) have re-emerged as a key focus in advanced microelectronics, becoming a key candidate device for breaking through the performance bottlenecks of traditional memory and overcoming the "Memory Wall" dilemma. This paper focuses on the application of FeFETs in non-volatile memory, systematically elaborates on their basic operating principles, and deeply investigates the influence laws of doping effects, annealing processes, cooling rates and other factors on the ferroelectric properties of hafnium oxide thin films. Aiming at the reliability issues of FeFETs. Particular emphasis is placed on analyzing the mechanisms and strategies for enhancing critical device performance metrics, such as memory window, endurance, and data retention time. Furthermore, this paper briefly reviews the latest research progress of FeFETs in terms of material optimization (such as hybrid ferroelectric layers and novel high-k interlayers) and structural innovation (such as IGZO-based FeFETs). Finally, the future development of FeFETs is prospected, indicating that hafnium oxide-based FeFETs hold important commercial application prospects in the fields of embedded non-volatile memory, neuromorphic computing, high-density storage and so on, and are expected to become the core component of the next-generation microelectronic memory devices.

     

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