氧化铪基铁电场效应晶体管的研究现状与未来展望

Research status and future prospects of hafnium oxide-based ferroelectric field-effect transistors

  • 摘要: 随着人工智能技术的快速发展,计算机需要处理的数据规模呈指数级增长,这对硬件存储性能提出了更高需求。传统闪存(flash)的读写速度已无法与中央处理器(central processing unit, CPU)的运算速度相匹配,由此产生的“存储墙”(memory wall)问题成为制约计算性能进一步提升的瓶颈。同时,高端消费电子产品向移动化方向的发展趋势对硬件的要求不断提高,尤其对超低功耗计算、高密度和低成本数据存储等需求日益迫切。自掺杂氧化铪(HfO2)薄膜中的铁电性被发现以来,基于氧化铪的铁电材料便在器件领域引起了广泛关注。得益于氧化铪薄膜与现代半导体制造工艺的良好兼容性及优异的可微缩性,铁电场效应晶体管(ferroelectric field-effect transistor, FeFET)在先进微电子领域重新成为研究热点,被视为突破传统存储器性能瓶颈、破解“存储墙”难题的关键候选器件。本文聚焦于FeFET在非易失性存储器中的应用,系统阐述其基本工作原理,深入探讨掺杂效应、退火工艺及冷却速率等因素对氧化铪薄膜铁电特性的影响规律。针对FeFET的可靠性问题,重点分析提升关键器件性能指标(如存储窗口、耐久性与保持时间)的机理与方法。此外,本文还综述了FeFET在材料优化(如混合铁电层、新型高k界面层)与结构创新(如铟镓锌氧化物FeFET)方面的最新研究进展。最后对FeFET的未来发展进行展望,指出氧化铪基 FeFET在嵌入式非易失性存储器、神经形态计算、高密度存储等领域具有重要的商业化应用前景,有望成为下一代微电子存储器件的核心组成部分。

     

    Abstract: With the rapid advancement of artificial intelligence technology, the scale of data to be processed by computers is growing exponentially, imposing increasingly stringent demands on the performance of computer hardware storage. The read and write speeds of conventional flash memory can no longer match the computing speed of central processing units (CPUs), creating the "memory wall" bottleneck that severely limits further improvements in computing performance. Meanwhile, the trend toward mobile and portable high-end consumer electronics has raised increasingly stringent hardware requirements, particularly for ultra-low-power operation, high integration density, and cost-effective data storage solutions. Since the discovery of ferroelectricity in doped hafnium oxide (HfO2) thin films, HfO2-based ferroelectric materials have attracted considerable attention in the device engineering community. Owing to the excellent compatibility and scalability of HfO2 thin films with modern semiconductor manufacturing processes, ferroelectric field-effect transistors (FeFETs) have re-emerged as a key focus in advanced microelectronics, becoming a key candidate device for breaking through the performance bottlenecks of traditional memory and overcoming the "Memory Wall" dilemma. This paper focuses on the application of FeFETs in non-volatile memory, systematically elaborates on their basic operating principles, and deeply investigates the influence laws of doping effects, annealing processes, cooling rates and other factors on the ferroelectric properties of hafnium oxide thin films. Aiming at the reliability issues of FeFETs, particular emphasis is placed on analyzing the mechanisms and strategies for enhancing critical device performance metrics, such as memory window, endurance, and data retention time. Furthermore, this paper briefly reviews the latest research progress of FeFETs in terms of material optimization (such as hybrid ferroelectric layers and novel high-k interlayers) and structural innovation (such as indium-gallium-zinc oxide based FeFETs). Finally, the future development of FeFETs is prospected, indicating that hafnium oxide-based FeFETs hold important commercial application prospects in the fields of embedded non-volatile memory, neuromorphic computing, high-density storage and so on, and are expected to become the core component of the next-generation microelectronic memory devices.

     

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