h-BN/β-Ga2O3异质结功率二极管高压终端结构设计与性能优化

Design and performance optimization of high-voltage termination structure for h-BN/β-Ga2O3 heterojunction power diode

  • 摘要: 氧化镓(β-Ga2O3)作为一种超宽禁带半导体,具有约4.9 eV的超宽禁带、8 MV·cm−1的高临界击穿场强以及优异的巴利加优值,在下一代高压低功耗电力电子领域展现出显著优势。然而,由于p型掺杂困难,其器件性能提升受到限制。六方氮化硼(h-BN)作为一种性能优异的超宽禁带半导体材料(约6.0 eV),不仅具备极高的击穿电场和热导率,而且相较于β-Ga2O3更容易实现稳定的p型掺杂,为解决传统β-Ga2O3器件中p型制备难题提供了理想的材料选择。因此,本文创新性地提出h-BN/β-Ga2O3异质结二极管,以解决传统Ga2O3二极管耐压(breakdown voltage, VB)低的问题。在此基础上,通过TCAD仿真设计沟槽与场限环复合终端结构,进一步提升器件的耐压水平。与基础Ga2O3肖特基二极管416 V的VB相比,基础h-BN/β-Ga2O3异质结二极管结构的VB提升至524 V,耐压提升25.7%。经过器件终端结构设计优化,最终器件VB提升至2480 V,实现了473.28% 的性能提升。本研究通过h-BN/β-Ga2O3异质结与高压终端结构设计,解决了p型Ga2O3难以实现以及强电场集中问题,为开发高压Ga2O3二极管提供了重要的技术参考。

     

    Abstract: Gallium oxide (β-Ga2O3), an ultra-wide bandgap semiconductor with a bandgap of approximately 4.9 eV, exhibits a high critical breakdown electric field of 8 MV·cm−1 and an excellent Baliga's figure of merit. These properties render it highly advantageous for next-generation high-voltage and low-power consumption power electronics. However, its device performance is limited by challenges in achieving p-type doping. Hexagonal boron nitride (h-BN), a high-performance ultra-wide bandgap semiconductor material with a bandgap of approximately 6.0 eV, not only demonstrates an exceptionally high breakdown electric field and thermal conductivity but also facilitates more stable p-type doping compared to β-Ga2O3. This characteristic presents an ideal material solution to address the p-type doping challenges inherent in traditional β-Ga2O3 devices. In this study, an innovative h-BN/β-Ga2O3 heterojunction diode is proposed to overcome the low VB limitation of conventional Ga2O3 diodes. Furthermore, a composite termination structure incorporating trenches and field-limiting rings is designed through TCAD simulation to enhance the device's breakdown voltage. Compared to a basic Ga2O3 Schottky diode with a VB of 416 V, the proposed h-BN/β-Ga2O3 heterojunction diode achieves a VB of 524 V, representing a 25.7% improvement in voltage resistance. After optimizing the device termination structure, the final breakdown voltage increases to 2480 V, achieving a performance enhancement of 473.28%. This work effectively addresses the challenges of p-type doping in Ga2O3 and electric field concentration through the design of the h-BN/β-Ga2O3 heterojunction and high-voltage termination structure, offering a significant technical reference for the advancement of high-voltage Ga2O3 diodes.

     

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