铪基铁电存储器的数据保持特性研究

Investigation of data retention in hafnium-based ferroelectric memory devices

  • 摘要: 人工智能技术的迅猛发展与智能化产业的持续升级显著推动了各类存储器的市场需求。本文聚焦于具有高密度、低功耗优势的铪基铁电非易失性存储器,该类器件因工艺兼容性优异、可微缩性强、可靠性高及集成度高等特点而备受关注。然而,数据保持能力仍是其大规模应用所面临的关键可靠性挑战。本文综述了近年来铪基铁电存储器在数据保持特性方面的主要研究进展:首先介绍了铪基铁电与反铁电存储器的工作原理及数据保持特性的表征方法;其次分析了影响保持特性的关键机制,包括印记效应和温度效应等;进而通过对比铪基铁电存储器与反铁电存储器,指出二者保持特性的显著差异主要源于不同的自由能模型;最后总结了当前改善数据保持特性的主要技术途径,包括元素掺杂、退火工艺优化及界面工程等方案。

     

    Abstract: The rapid development of artificial intelligence technology and the continuous upgrading of intelligent industries have greatly driven market demand for various memory types. This paper focuses on hafnium-based ferroelectric memory, which features high density and low power consumption and has attracted considerable attention due to its excellent process compatibility, strong scalability, high reliability, and high integration density. Nevertheless, its data retention capability remains a key reliability challenge for large-scale applications. This paper summarizes recent research progress on the retention characteristics of hafnium-based ferroelectric memories. It first introduces the working principles of hafnium-based ferroelectric and antiferroelectric memories and the characterization methods for data retention. Subsequently, it analyzes key mechanisms affecting retention, including imprint and temperature effects. Comparative analysis reveals that the notable differences in retention characteristics between hafnium-based ferroelectric and antiferroelectric memories stem primarily from their free energy models. Finally, the paper summarizes technical strategies to improve data retention, including element doping, annealing process optimization, and interface engineering.

     

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