LDMOS版图级漂移区尺寸缩微与分段场板工程协同设计技术研究

Research on the co-design technology of layout-level drift region scaling and segmented field plate engineering for LDMOS

  • 摘要: 针对标准0.15 μm bipolar-CMOS-DMOS(BCD)工艺下高压N型横向双扩散金属氧化物半导体(N-type laterally diffused metal-oxide-semiconductor, NLDMOS)器件面临的制造成本与性能折中难题,本文提出一种基于版图级漂移区尺寸缩微与分段场板工程协同优化的设计方案。该方案在不增加任何光刻掩膜或工艺步骤的前提下,突破了传统设计中 “以空间换耐压” 的局限性。通过引入多晶硅分段场板结构,利用其对表面电场的二次调制效应,有效缓解因大幅缩减漂移区关键尺寸(积累区长度Lacc、源极场板长度LFP 及漂移区延伸段长度Lgap)所引发的电场集中风险。技术计算机辅助设计(technology computer-aided design, TCAD)仿真结果表明,优化后的器件在显著减小单元节距与电流传输路径的同时,击穿电压(breakdown voltage, VBR)提升至54.32 V,展现出优异的耐压鲁棒性;特征导通电阻(Ron, sp)从28.22 mΩ·mm2显著降低至19.27 mΩ·mm2,降幅达31.7%。最终,器件的Baliga优值(Baliga figure of merit, BFOM)提升47.5%,达到153.1 V2·mΩ−1·mm−2。本研究实现了器件集成密度与电学性能的双重突破,为低成本高性能电源管理芯片设计提供了有效路径。

     

    Abstract: This study addresses the inherent trade-off between manufacturing cost and device performance in high-voltage N-type laterally diffused metal-oxide-semiconductor (NLDMOS) devices fabricated using a standard 0.15 μm BCD (bipolar-CMOS-DMOS) process. A layout-level co-optimization strategy is proposed, integrating drift region scaling with segmented field plate engineering. The approach aims to overcome the limitations of the conventional "space-for-breakdown-voltage" paradigm without introducing additional photomasks or process steps. By employing segmented polysilicon field plates, the surface electric field is effectively re-modulated, mitigating electric field crowding caused by the aggressive reduction of critical drift region dimensions, including the accumulation region (Lacc), source field plate (LFP), and drift region extension (Lgap). Technology computer-aided design (TCAD) simulation results indicate that the optimized device achieves significant reductions in both cell pitch and current transmission path length while maintaining robust voltage-withstanding capabilities. The breakdown voltage (VBR) is slightly improved to 54.32 V. Furthermore, the specific on-resistance (Ron,sp) is reduced by 31.7%, decreasing from 28.22 mΩ·mm2 to 19.27 mΩ·mm2. The Baliga figure of merit (BFOM) is enhanced by 47.5%, reaching 153.1 V2·mΩ−1·mm−2. This work achieves a dual breakthrough in device integration density and electrical performance, offering a cost-effective technical solution for the design of high-performance power management integrated circuits (PMICs).

     

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