Abstract: High-sensitivity sensors play a critical role in fundamental physics research, space magnetic field detection, geological monitoring, and biomedical applications. Atomic sensors, based on quantum mechanics principles, such as atomic magnetometers, atomic clocks, and atomic gyroscopes, etc, have emerged as pivotal technical equipment for precision measurements due to their exceptional sensitivity, low power consumption, and long-term stability. The atomic vapor cell, serving as the core component, facilitates quantum state manipulation via the Zeeman effect. Miniaturization and integration of these cells have not only advanced the development of portable atomic magnetometers but also provided a foundation for breakthroughs in chip-scale atomic clocks and enhanced navigation accuracy of atomic gyroscopes. The research progresses of chip-scale atomic vapor cells in recent years are reviewed. The advancements in alkali metal introduction methods, anti-relaxation surface coatings, and micro-nano fabrication techniques have enabled the miniaturization of atomic vapor cells while preserving high performance, creating new opportunities for the deployment of quantum sensing technologies across diverse fields. Looking ahead, multifunctional integration and material innovations in atomic vapor cells are expected to further broaden their applications in time-frequency standards, inertial navigation systems, and weak magnetic field measurements.