Abstract:
In this paper, the carrier transport characteristics of a high-performance SiGe-on-insulator p-channel metal-oxide-semiconductor field-effect transistor (SiGe-OI pMOSFET) are systematically investigated using a back-gate modulation method. High-quality SiGe-OI pMOSFET is fabricated based on selective remote GeO
x scavenging technology. Due to its excellent MOS interface properties, the effective hole mobility
μeff reaches 136 cm
2·(V·s)
−1 and 90 cm
2·(V·s)
−1 at peak and high-field conditions (
NS=1×10
13 cm
−2), respectively. The modulating results show that, as the back-gate voltage becomes more negative, the
μeff increases across the entire
NS range. Under the effective electric field model, when the effective electric field
Eeff < 0.5 MV·cm
−1, the electric field dependence factor of the
μeff is −0.3; as
Eeff increases to 0.8 MV·cm
−1, this factor decreases only slightly to −0.6. This behavior indicates that phonon scattering is the dominant mechanism governing carrier transport in high-performance Si
0.73Ge
0.27-OI pMOSFETs.