基于背栅调控的高性能Si0.73Ge0.27-OI pMOSFET输运特性研究

Investigation of carrier transport in high performance Si0.73Ge0.27-OI pMOSFET through back-gate modulation

  • 摘要: 采用背栅调控方法系统性研究高性能绝缘层上硅锗沟道p型场效应晶体管(SiGe-on-insulator p-channel metal-oxide-semiconductor field-effect transistor, SiGe-OI pMOSFET)的载流子输运特性。基于选择性远程清除氧化锗技术制备高质量的Si0.73Ge0.27-OI pMOSFET器件,得益于其优异的界面特性,空穴有效迁移率(μeff)在峰值及高场条件(NS=1×1013 cm−2)下分别达到136 cm2·(V·s)−1和90 cm2·(V·s)−1。调控结果表明,随着背栅电压的负向增大,μeff在整个NS范围内均呈上升趋势。在有效电场(Eeff)模型下,当Eeff < 0.5 MV·cm−1时,μeff的电场依赖性因子为−0.3;当Eeff上升至0.8 MV·cm−1时,该因子仅为−0.6。这表明,在高性能Si0.73Ge0.27-OI pMOSFET中,声子散射是载流子输运过程中的主导散射机制。

     

    Abstract: In this paper, the carrier transport characteristics of a high-performance SiGe-on-insulator p-channel metal-oxide-semiconductor field-effect transistor (SiGe-OI pMOSFET) are systematically investigated using a back-gate modulation method. High-quality SiGe-OI pMOSFET is fabricated based on selective remote GeOx scavenging technology. Due to its excellent MOS interface properties, the effective hole mobility μeff reaches 136 cm2·(V·s)−1 and 90 cm2·(V·s)−1 at peak and high-field conditions (NS=1×1013 cm−2), respectively. The modulating results show that, as the back-gate voltage becomes more negative, the μeff increases across the entire NS range. Under the effective electric field model, when the effective electric field Eeff < 0.5 MV·cm−1, the electric field dependence factor of the μeff is −0.3; as Eeff increases to 0.8 MV·cm−1, this factor decreases only slightly to −0.6. This behavior indicates that phonon scattering is the dominant mechanism governing carrier transport in high-performance Si0.73Ge0.27-OI pMOSFETs.

     

/

返回文章
返回