材料基因组技术在集成电路材料研究中的应用进展
Application Progress of Materials Genome Technology in the Research of Integrated Circuits Materials
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摘要: 传统材料科学的“试错式”研究方法日益成为限制现代材料工业发展与突破的瓶颈, 而材料基因组技术作为材料科学研究的革新技术, 可以加速新材料的研发和应用, 缩减研究成本和周期, 成为当下研究的热点。本文围绕材料基因组技术, 介绍了高通量实验、高通量计算与材料数据库三大要素的主要内容和典型研究范例。重点梳理了材料基因组技术在集成电路领域的研究进展, 指出了集成电路材料研发的复杂性和广阔的可优化空间, 提出了要结合材料基因组技术加速集成电路材料的创新, 促进未来集成电路材料领域的发展。Abstract: Traditional materials research relaying on trial and error has increasingly become the bottleneck for the development and breakthroughs of modern materials industry. Innovative materials genome technology has become a hotspot in materials science research due to it can shorten the cycle of new materials development and reduce research costs. This paper mainly introduces three parts of materials genome technology: high-throughput calculation, high-throughput experimentation, material database. Some representative works are also mentioned. Then the materials genome researches in the field of integrated circuits (IC) are reviewed. In addition, the complexity and optimize ability of the IC materials genome research are pointed out, and we recommend accelerating the innovation and development of integrated circuit materials by using materials genome technology.
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