基于Sb2 S3和Sb2 Se3相变材料的非易失性可调光开关及其性能研究

Nonvolatiletunable optical switches based on Sb2 S3 and Sb2 Se3 phase change materials and their properties

  • 摘要: 因具有较低的消光系数、较大的折射率差异和较高的热稳定性等性质, Sb2S3和Sb2Se3是发展低损耗、可调制和非易失性集成光子器件最具前景的候选相变材料之一。本文采用原位升温电学测试平台和椭偏仪研究Sb2S3和Sb2Se3材料的热稳定性和折射率性质, 利用相变材料与硅基微环波导混合集成技术, 设计了一种基于Sb2S3和Sb2Se3薄膜的硅基微环1×1非易失性可调光开关, 并利用时域有限差分法(FTDT)进行仿真分析, 比较了它们的器件性能。结果表明, 在1 518 ~1 575 nm的波长范围内, Sb2S3光开关的消光比(ER)和插入损耗(IL)分别为20.63 dB和1.35 dB。基于Sb2Se3的光开关, ER=25.2 dB, IL=0.07 dB。Sb2Se3光开关比传统Ge2Sb2Te5(GST)光开关的ER高6.5 dB, IL小1.88 dB。由此, Sb2Se3在改善光开关的消光比和插入损耗等性能方面更具有吸引力。

     

    Abstract: Sb2S3 and Sb2Se3 are one of the most promising phase change materials for the development of low loss, modulable and non-volatile integrated photonic devices due to their low extinction coefficient, large refractive index difference and high thermal stability. In this paper, the thermal stability and refractive index properties of Sb2S3 and Sb2Se3 materials have been studied by in-situ heating electrical test platform and ellipsometry. A silicon based 1×1 non-volatile tunable optical switch based on Sb2S3 or Sb2Se3 film has been designed by hybrid integration of phase change materials and silicon based microring waveguide. The simulation analysis has been carried out by using the finite difference time domain (FTDT) method, and their device performance has been compared. It is shown that in the wavelength range of 1 518 ~1 575 nm, the extinction ratio (ER) and insertion loss (IL) of the Sb2S3-based optical switch are 20.63 dB and 1.35 dB, respectively. For Sb2Se3, ER=25.2 dB, IL=0.07 dB. Its ER is 6.5 dB higher than that of the conventional Ge2Sb2Te5(GST)-based optical switch, and the IL is 1.88 dB smaller. Thus, Sb2Se3 is more attractive in improving the performance of optical switches such as extinction ratio and insertion loss.

     

/

返回文章
返回