纳米孔与纳米光栅协同的高性能Ga2O3光电探测器仿真研究

Simulation on high-performance Ga2O3 photodetectors with the synergism of nanohole and nanograting

  • 摘要: 太阳是地球紫外线的主要来源,其中UVC波段(200–280 nm)被大气臭氧强烈吸收,形成天然低背景噪声的“日盲区”。在该波段工作的日盲紫外光电探测器在火焰检测、导弹预警和臭氧监测中具有重要应用。β-Ga2O3凭借其4.7–4.9 eV的超宽禁带宽度,成为制备该类探测器的理想材料。为提高器件性能,本文提出一种由表面纳米孔与底部铝光栅组成的双层光捕获结构。基于时域有限差分法的仿真结果表明,该复合结构在250 nm波长处的吸收率可达63.7%,较无结构器件提升了约247%。同时,器件的响应度从0.55 A/W提升至7.08 A/W,并在60°大角度入射下仍保持50%以上的响应度,展现出优异的角度鲁棒性。仿真结果验证了纳米孔的散射增强与金属光栅等离子体共振之间的协同效应,为高性能Ga2O3基日盲紫外探测器的设计与制备提供了理论依据。

     

    Abstract: The Sun serves as the primary source of ultraviolet radiation on Earth. The UVC band, 200–280 nm, is strongly absorbed by atmospheric ozone, thereby establishing a naturally low-background-noise “solar-blind region.” Solar-blind UV photodetectors operating within this spectral range exhibit significant potential in applications such as flame detection, missile early warning systems, and ozone monitoring. With its ultra-wide bandgap of 4.7–4.9 eV, β-Ga2O3 has emerged as a highly promising material for the fabrication of such detectors. To further enhance device performance, this study introduces a dual-layer light-trapping architecture that incorporates surface nanopores and a bottom aluminum grating. Simulations conducted using the Finite Difference Time Domain (FDTD) method reveal that this composite structure achieves an absorption efficiency of 63.7% at a wavelength of 250 nm, representing a 247% improvement compared to unstructured devices. Additionally, the device’s responsivity increases from 0.55 A/W to 7.08 A/W, with more than 50% responsivity retained even at incident angles as large as 60°, demonstrating exceptional angular robustness. These simulation results confirm the synergistic interaction between light-scattering enhancement from nanopores and plasmonic resonance in metal gratings, offering a robust theoretical foundation for the design and fabrication of high-performance Ga2O3-based solar-blind ultraviolet detectors.

     

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