Abstract: High-reflection films which consist of metallic silver and dielectric ZrO₂ layers were deposited on the rear facets of semiconductor lasers. The silver layer was sandwiched by two ZrO₂ layers for both isolation of Ag from semiconductor material of the lasers and protection of the soft silver layer. The optoelectronic measurements of the facet-coated lasers show that output power is 60% higher than the uncoated one, while the threshold current decreases 20%～50%. Furthermore, the high-reflection films have good mechanical strength, thermal and chemical stabilities. It can protect the rear facet of lasers from damage.