大气压粉末原子层沉积研究进展

Advances in atmospheric-pressure particle atomic layer deposition

  • 摘要: 大气压粉末原子层沉积技术是一种在大气压或接近大气压条件下对功能粉末材料表面进行纳米级厚度精确修饰的技术,在能源材料和催化剂材料等领域具有广阔的应用前景。该技术无需真空系统,显著降低了设备成本和维护成本,因此在工业放大生产中展现出明显优势。对粉末原子层沉积的自限制性表面化学反应原理进行介绍,分析该技术需克服的技术难点及其优势与不足,概述原子层沉积的保形性特点,总结大气压下时间和空间原子层沉积反应腔的设计方法及其在高通量粉末处理中的差异,探讨大气压粉末原子层沉积在催化、药物输运、锂电池等领域的应用,并对未来可能的研究方向进行展望。

     

    Abstract: Atmospheric pressure particle atomic layer deposition (AP-PALD) shows promising potentials in the fields of energy and catalytic materials due to its ability in precisely modifying the surfaces of functional materials operated at atmospheric or near-atmospheric pressure. This technique eliminates the need for a vacuum system, reducing the equipment and maintenance costs, and thereby exhibits great advantages for scaling up processes. This paper reviews the fundamentals of self-terminating surface reactions on particles via ALD, challenges needing to be overcome, and pros and cons of AP-PALD. The conformality of ALD has been overviewed briefly, followed by the development of reactor designs for temporal ALD (t-ALD) and spatial ALD (s-ALD) under atmospheric pressure together with the comparison about processing of high-throughput particles using t-ALD and s-ALD. The applications of AP-PALD used in catalytic materials, drug delivery, Li-ion batteries, and other areas are summarized. Future perspectives of AP-PALD are also addressed.

     

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