Research progress and future prospect of micro quasi-solid piezoelectric fan

The micro quasi-solid piezoelectric fan, leveraging the inverse piezoelectric effect, utilizes high-frequency vibrations to drive directional airflow, thereby enabling a quasi-solid-state design devoid of rotating components. Such systems offer advantages including compact structure, low power consumption, low noise, and rapid response, demonstrating broad application prospects for the thermal management of high-density electronic devices in confined spaces. This paper reviews the latest research progress and representative products of micro quasi-solid piezoelectric fans, such as cantilever-beam fans, synthetic jet piezoelectric air pumps, and active cooling chips, developed by major research institutions and enterprises globally. Key technologies for optimizing performance are discussed, including multi-physics coupling simulation in confined spaces, collaborative design of flow rate and back pressure, noise suppression, advanced microscale fabrication, and engineering reliability. Finally, future development trends are outlined, focusing on miniaturization, high integration, and the coordinated improvement of flow rate and back pressure.