Research on preparation of vertically oriented carbon nanotubes based on silicon tips

This study introduces a method for preparing vertically oriented carbon nanotubes (CNTs) on silicon tips, aimed at meeting the application requirements of atomic force microscope (AFM) probes. Initially, a silicon tip array with a height of approximately 6 μm was fabricated through optimized mask design and KOH wet etching. Subsequently, a patterning technique was utilized to selectively deposit ferritin molecules as catalysts on the apex of the silicon tips. Finally, thermal chemical vapor deposition (CVD) with optimized parameters was employed to successfully grow single vertically aligned CNTs, with a diameter ranging from 16-20 nm, on the silicon tips. Characterization via scanning electron microscopy (SEM) and transmission electron microscopy (TEM) confirmed the uniform structure and high crystallinity of the CNTs. Additionally, Raman spectroscopy further verified their high degree of graphitization. The research results can provide feasible technical solutions for the preparation of high-performance AFM probes and have important application value.